Titanium Diboride Sputtering Target

Formula: TiB₂

Form: Sputtering Target

Material: Titanium Diboride

CAS Number: 12045-63-5

Commodity: Compounds

Thickness: 6mm

Diameter: 50mm

Titanium Diboride Sputtering Targets are made from an ultra-hard, chemically inert ceramic that features excellent thermal and electrical conductivity along with outstanding wear and corrosion resistance. These disks are ideal for thin film deposition and coating applications where hardness, thermal stability and conductivity are required, such as hard wear-resistant coatings, diffusion barriers and thermally conductive films.

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Technical Data Sheet Safety Data Sheet Tolerance Properties

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Material Properties for Compounds

Chemical Resistance

Element	Value
Acids - concentrated	Fair
Acids - dilute	Good
Alkalis	Fair
Halogens	Good
Metals	Good

Mechanical Properties

Element	Value
Poisson's ratio	0.18-0.2
Tensile modulus( GPa )	520-570
Hardness - Vickers( kgf mm⁻² )	3000
Shear strength( MPa )	300-600

Thermal Properties

Element	Value
Melting point( C )	3000
Upper continuous use temperature( C )	1000-2000
Thermal conductivity( W m⁻¹ K⁻¹ )	50-70@20°C
Coefficient of thermal expansion( x10⁻⁶ K⁻¹ )	6-7@20-1000°C