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Yttria-stabilized Zirconia Sputtering Target

Formula: ZrO₂/Y₂O₃
Form: Sputtering Target
Material: Zirconia - stabilized with Yttria
CAS Number: 114168-16-0
Commodity: Ceramics
Production Method: Hot Pressed
Yttria-Stabilised Zirconia Sputtering Target disks are high quality ceramic disks. Available in 3 variations, they exhibit excellent dielectric properties and high fracture toughness, while the addition of yttria to zirconia imparts thermal shock resistance. These properties make them useful for thin film coatings and thermal barrier applications using magnetron sputtering deposition techniques.
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Material Properties for Ceramics

Thermal Properties
Element Value
Melting point( C ) 2700
Upper continuous use temperature( C ) 2200
Specific heat( J K⁻¹ kg⁻¹ ) 400-500@25°C
Thermal conductivity( W m⁻¹ K⁻¹ ) 2.5@20°C
Coefficient of thermal expansion( x10⁻⁶ K⁻¹ ) 10@20-1000°C
Physical Properties
Element Value
Density( gcm⁻³ ) 5.9
Mechanical Properties
Element Value
Tensile modulus( GPa ) 200
Hardness - Vickers( kgf mm⁻² ) 1250
Tensile strength( MPa ) 300-600
Pultrusions
Element Value
Compressive strength( MPa ) 2000

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