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Technical Data Sheet
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Tungsten Silicide Sputtering Target

Tungsten Silicide Sputtering Targets are a high-performance material with a high melting point and excellent conductivity. These properties make tungsten silicide valued for thin film deposition applications like microelectronics fabrication. These precision-engineered targets enable efficient, uniform coatings in semiconductor production and related manufacturing.
Formula: WSi₂
Thickness: 3mm
Diameter: 50.8mm
CAS Number: 12039-88-2
UOM Code: 364-581-07
SKU: 1000150719
Product Code: W-54-ST-000100
Technical Data Sheet
Safety Data Sheet
$724.88
each
  • Buy 5 for $587.15 each and save 19%
  • Buy 10 for $536.41 each and save 26%
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Material Properties for Compounds

Physical Properties
Element Value
Density( gcm⁻³ ) 9.4
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