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Formula: Ru
Form: Sputtering Target
Material: Ruthenium
CAS Number: 7440-18-8
Commodity: Precious Metals
Purity:
99.9%
Ruthenium Sputtering Targets are available in 8 variations to provide options to choose the right size, thickness and purity to fit your application. Their high density, hardness, and corrosion resistance make them well-suited for use as a sputtering target in the semiconductor industry to deposit thin ruthenium films. They can also be used in other coating processes requiring a ruthenium source material. Our Ruthenium Sputtering Targets provides the ideal ruthenium source for research and industrial coating applications.
Material Properties for Precious Metals
Atomic Properties
| Element | Value |
|---|---|
| Atomic number | 44 |
| Crystal structure | Hexagonal close packed |
| Electronic structure | Kr 4d⁷ 5s¹ |
| Valences shown | 0,1,2,3,4,5,6,7,8 |
| Atomic weight( amu ) | 101.07 |
| Thermal neutron absorption cross-section( Barns ) | 3 |
| Photo-electric work function( eV ) | 4.71 |
| Natural isotope distribution( Mass No./% ) | 99/ 12.7 |
| Natural isotope distribution( Mass No./% ) | 96/ 5.5 |
| Natural isotope distribution( Mass No./% ) | 104/ 18.6 |
| Natural isotope distribution( Mass No./% ) | 98/ 1.9 |
| Natural isotope distribution( Mass No./% ) | 101/ 17.1 |
| Natural isotope distribution( Mass No./% ) | 100/ 12.6 |
| Natural isotope distribution( Mass No./% ) | 102/ 31.6 |
| Atomic radius - Goldschmidt( nm ) | 0.134 |
| Ionisation potential( No./eV ) | 2/ 16.8 |
| Ionisation potential( No./eV ) | 3/ 28.5 |
| Ionisation potential( No./eV ) | 1/ 7.36 |
Mechanical Properties
| Element | Value |
|---|---|
| Material condition | Hard |
| Material condition | Soft |
| Poisson's ratio | 0.25 |
| Poisson's ratio | 0.25 |
| Bulk modulus( GPa ) | 286 |
| Bulk modulus( GPa ) | 286 |
| Tensile modulus( GPa ) | 432 |
| Tensile modulus( GPa ) | 432 |
| Hardness - Vickers( kgf mm⁻² ) | 750 |
| Hardness - Vickers( kgf mm⁻² ) | 350 |
| Tensile strength( MPa ) | 495 |
| Yield strength( MPa ) | 372 |
Electrical Properties
| Element | Value |
|---|---|
| Electrical resistivity( µOhmcm ) | 7.7@20@20°C |
| Superconductivity critical temperature( K ) | 0.49 |
| Temperature coefficient( K⁻¹ ) | 0.0041@0-100 |
Physical Properties
| Element | Value |
|---|---|
| Boiling point( C ) | 3900 |
| Density( gcm⁻³ ) | 12.2@20 |
Thermal Properties
| Element | Value |
|---|---|
| Melting point( C ) | 2310 |
| Latent heat of evaporation( J g⁻¹ ) | 5610 |
| Latent heat of fusion( J g⁻¹ ) | 252 |
| Specific heat( J K⁻¹ kg⁻¹ ) | 238@20°C |
| Thermal conductivity( W m⁻¹ K⁻¹ ) | 117@0-100°C |
| Coefficient of thermal expansion( x10⁻⁶ K⁻¹ ) | 9.6@0-100°C |
Other Customers Purchased
-
Nickel/Vanadium Alloy Sputtering Target (Ni93/V 7) Formula: Ni93/V 7
Thickness: 3mm
Diameter: 76.2mm
UOM Code: 300-832-51
eachStarting at $449.41
Discounts applied for volume purchases -
Ruthenium Rod Formula: Ru
Percentage Purity: 99.9%
Diameter: 5.9mm
Length: 50mm
CAS Number: 7440-18-8
UOM Code: 238-211-19
eachStarting at $2,069.18
Discounts applied for volume purchases -
Ruthenium Foil Formula: Ru
Percentage Purity: 99.9%
Thickness: 1mm
Length 1: 10mm
Length 2: 10mm
CAS Number: 7440-18-8
UOM Code: 514-871-22
eachStarting at $1,174.83
Discounts applied for volume purchases -
Ruthenium Pellets Formula: Ru
Percentage Purity: 99.9%
Maximum Lump Size: 10mm
Weight: 10g
CAS Number: 7440-18-8
UOM Code: 840-011-06
eachStarting at $464.34
Discounts applied for volume purchases -
Ruthenium Powder Formula: Ru
Percentage Purity: 99.9%
Maximum Particle Size: 850µm
Weight: 20g
CAS Number: 7440-18-8
UOM Code: 327-807-28
eachStarting at $473.74
Discounts applied for volume purchases -
Nickel/Iron/Molybdenum Alloy Sputtering Target (Ni80/Fe15.5/Mo 4.5) Formula: Ni80/Fe15.5/Mo 4.5
Thickness: 3mm
Diameter: 50.8mm
UOM Code: 934-571-32
eachStarting at $361.99
Discounts applied for volume purchases
