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Formula: Ru
Form: Sputtering Target
Material: Ruthenium
CAS Number: 7440-18-8
Commodity: Precious Metals
Purity: 99.9%
Ruthenium Sputtering Target provides high purity, uniform density, and excellent thin film deposition performance, critical for semiconductor, data storage, and optical coating industries. Its controlled grain size, low impurity content, and structural homogeneity ensure consistent sputtering behavior and minimize defects such as arcing and particle generation. Common uses include depositing diffusion barriers in microchips, creating magnetic layers for hard disk drives, and forming catalytic or conductive coatings in specialized devices. Technologies such as advanced semiconductor interconnects, magnetic recording media, and electrochemical sensors benefit from ruthenium targets’ precision and stability. In research, they support the development of novel thin film materials, high-density data storage prototypes, and corrosion-resistant microstructures. Their role in enabling reproducible, defect-free coatings ensures their importance across high-tech industrial and research applications.
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Material Properties for Precious Metals

Atomic Properties
Element Value
Atomic number 44
Crystal structure Hexagonal close packed
Electronic structure Kr 4d⁷ 5s¹
Valences shown 0,1,2,3,4,5,6,7,8
Atomic weight( amu ) 101.07
Thermal neutron absorption cross-section( Barns ) 3
Photo-electric work function( eV ) 4.71
Natural isotope distribution( Mass No./% ) 99/ 12.7
Natural isotope distribution( Mass No./% ) 96/ 5.5
Natural isotope distribution( Mass No./% ) 104/ 18.6
Natural isotope distribution( Mass No./% ) 98/ 1.9
Natural isotope distribution( Mass No./% ) 101/ 17.1
Natural isotope distribution( Mass No./% ) 100/ 12.6
Natural isotope distribution( Mass No./% ) 102/ 31.6
Atomic radius - Goldschmidt( nm ) 0.134
Ionisation potential( No./eV ) 2/ 16.8
Ionisation potential( No./eV ) 3/ 28.5
Ionisation potential( No./eV ) 1/ 7.36
Mechanical Properties
Element Value
Material condition Hard
Material condition Soft
Poisson's ratio 0.25
Poisson's ratio 0.25
Bulk modulus( GPa ) 286
Bulk modulus( GPa ) 286
Tensile modulus( GPa ) 432
Tensile modulus( GPa ) 432
Hardness - Vickers( kgf mm⁻² ) 750
Hardness - Vickers( kgf mm⁻² ) 350
Tensile strength( MPa ) 495
Yield strength( MPa ) 372
Electrical Properties
Element Value
Electrical resistivity( µOhmcm ) 7.7@20@20°C
Superconductivity critical temperature( K ) 0.49
Temperature coefficient( K⁻¹ ) 0.0041@0-100
Physical Properties
Element Value
Boiling point( C ) 3900
Density( gcm⁻³ ) 12.2@20
Thermal Properties
Element Value
Melting point( C ) 2310
Latent heat of evaporation( J g⁻¹ ) 5610
Latent heat of fusion( J g⁻¹ ) 252
Specific heat( J K⁻¹ kg⁻¹ ) 238@20°C
Thermal conductivity( W m⁻¹ K⁻¹ ) 117@0-100°C
Coefficient of thermal expansion( x10⁻⁶ K⁻¹ ) 9.6@0-100°C

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