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Formula: Ru
Form: Sputtering Target
Material: Ruthenium
CAS Number: 7440-18-8
Commodity: Precious Metals
Purity: 99.9%
Ruthenium Sputtering Targets are available in 8 variations to provide options to choose the right size, thickness and purity to fit your application. Their high density, hardness, and corrosion resistance make them well-suited for use as a sputtering target in the semiconductor industry to deposit thin ruthenium films. They can also be used in other coating processes requiring a ruthenium source material. Our Ruthenium Sputtering Targets provides the ideal ruthenium source for research and industrial coating applications.
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Material Properties for Precious Metals

Atomic Properties
Element Value
Atomic number 44
Crystal structure Hexagonal close packed
Electronic structure Kr 4d⁷ 5s¹
Valences shown 0,1,2,3,4,5,6,7,8
Atomic weight( amu ) 101.07
Thermal neutron absorption cross-section( Barns ) 3
Photo-electric work function( eV ) 4.71
Natural isotope distribution( Mass No./% ) 99/ 12.7
Natural isotope distribution( Mass No./% ) 96/ 5.5
Natural isotope distribution( Mass No./% ) 104/ 18.6
Natural isotope distribution( Mass No./% ) 98/ 1.9
Natural isotope distribution( Mass No./% ) 101/ 17.1
Natural isotope distribution( Mass No./% ) 100/ 12.6
Natural isotope distribution( Mass No./% ) 102/ 31.6
Atomic radius - Goldschmidt( nm ) 0.134
Ionisation potential( No./eV ) 2/ 16.8
Ionisation potential( No./eV ) 3/ 28.5
Ionisation potential( No./eV ) 1/ 7.36
Mechanical Properties
Element Value
Material condition Hard
Material condition Soft
Poisson's ratio 0.25
Poisson's ratio 0.25
Bulk modulus( GPa ) 286
Bulk modulus( GPa ) 286
Tensile modulus( GPa ) 432
Tensile modulus( GPa ) 432
Hardness - Vickers( kgf mm⁻² ) 750
Hardness - Vickers( kgf mm⁻² ) 350
Tensile strength( MPa ) 495
Yield strength( MPa ) 372
Electrical Properties
Element Value
Electrical resistivity( µOhmcm ) 7.7@20@20°C
Superconductivity critical temperature( K ) 0.49
Temperature coefficient( K⁻¹ ) 0.0041@0-100
Physical Properties
Element Value
Boiling point( C ) 3900
Density( gcm⁻³ ) 12.2@20
Thermal Properties
Element Value
Melting point( C ) 2310
Latent heat of evaporation( J g⁻¹ ) 5610
Latent heat of fusion( J g⁻¹ ) 252
Specific heat( J K⁻¹ kg⁻¹ ) 238@20°C
Thermal conductivity( W m⁻¹ K⁻¹ ) 117@0-100°C
Coefficient of thermal expansion( x10⁻⁶ K⁻¹ ) 9.6@0-100°C

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