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Formula: MoSi₂
Form: Sputtering Target
Material: Molybdenum Disilicide
CAS Number: 12136-78-6
Commodity: Compounds
Thickness: 6mm

Molybdenum Disilicide Sputtering Target

Molybdenum Disilicide Sputtering Target offers high thermal stability, excellent oxidation resistance, and electrical conductivity in a dense, uniform form tailored for thin-film deposition. Its self-healing silica layer formation ensures reliable performance during high-temperature sputtering, making it ideal for producing durable coatings and functional layers. Industries such as electronics, optics, and aerospace employ these targets for depositing oxidation-resistant films, semiconducting layers, and protective coatings in harsh environments. Specific applications include thin films for MEMS devices, passivation layers in semiconductor fabrication, and protective optical coatings. Research investigates MoSi₂ thin films for catalytic activity, electronic device optimization, and exploration of nanostructured multilayers. The sputtering target form ensures consistent film quality, precise composition control, and repeatable deposition, making it indispensable for both commercial production and experimental thin-film materials science.
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Material Properties for Compounds

Physical Properties
Element Value
Density( gcm⁻³ ) 6.31

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