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Fused Quartz Sputtering Target

Formula: SiO₂
Form: Sputtering Target
Material: Quartz - Fused
CAS Number: 14808-60-7
Commodity: Ceramics
Goodfellow's Fused Quartz Sputtering Target is a high-purity, amorphous silicon dioxide (SiO₂) product designed for thin film deposition applications. These targets offer exceptional purity and homogeneity, ensuring consistent and high-quality thin film coatings. Their amorphous structure allows for uniform sputtering rates and excellent film adhesion, while their high chemical purity minimizes contamination in the deposited layers. Fused quartz sputtering targets find extensive use in industries such as semiconductor manufacturing, optical coating production, and advanced materials research. They are crucial in the production of dielectric layers in microelectronics, optical interference coatings for precision optics, and protective coatings for various substrates. In cutting-edge applications, these targets are utilized in the development of advanced photonic devices, such as waveguides for integrated optical circuits, and in the production of high-performance thin film sensors. In research settings, fused quartz sputtering targets play a vital role in studying novel thin film materials and in developing new coating technologies for emerging applications. Their reliability and versatility make them indispensable in both industrial thin film production and scientific investigations, particularly in fields pushing the boundaries of nanotechnology and advanced optical materials.
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Material Properties for Ceramics

Chemical Resistance
Element Value
Acids - concentrated Good
Acids - dilute Good
Alkalis Fair
Halogens Good
Metals Fair
Electrical Properties
Element Value
Dielectric constant 3.8
Dielectric strength( kV mm⁻¹ ) 25-40
Volume resistivity( Ohmcm ) 10¹⁸@25
Physical Properties
Element Value
Refractive index 1.46
Useful optical transmission range 180-2500nm
Apparent porosity( % ) 0
Water absorption - saturation( % ) 0
Density( gcm⁻³ ) 2.2
Thermal Properties
Element Value
Melting point( C ) 1715
Upper continuous use temperature( C ) 1100-1400
Specific heat( J K⁻¹ kg⁻¹ ) 670-740@25°C
Thermal conductivity( W m⁻¹ K⁻¹ ) 1.46@20°C
Coefficient of thermal expansion( x10⁻⁶ K⁻¹ ) 0.54@20-1000
Mechanical Properties
Element Value
Tensile modulus( GPa ) 72-74
Hardness - Knoop( kgf mm⁻² ) 820
Hardness - Vickers( kgf mm⁻² ) 1000
Shear strength( MPa ) 70
Tensile strength( MPa ) 48
Pultrusions
Element Value
Compressive strength( MPa ) 1100

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