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Fused Quartz Sputtering Target
Our range of Quartz - Fused Sputtering Targets are manufactured from high purity fused quartz and are available in a variety of dimensions and thicknesses. They have excellent chemical and physical stability at high temperatures making them ideal for sputtering applications where high purity and uniformity is required. They’re commonly used in microelectronics and semiconductor device fabrication to deposit thin and uniform quartz layers onto silicon wafers and other substrates. With 10 variations to choose from, we can provide fused quartz sputtering target disks tailored to your specific sputtering needs.
Formula: SiO₂
Percentage Purity: 99%
Thickness: 3mm
Diameter: 50mm
CAS Number: 14808-60-7
UOM Code: 159-891-36
Percentage Purity: 99%
Thickness: 3mm
Diameter: 50mm
CAS Number: 14808-60-7
UOM Code: 159-891-36
SKU: 1000056263
Product Code: SI61-ST-000101
$173.57
each
- Buy 5 for $140.59 each and save 19%
- Buy 10 for $128.44 each and save 26%
No Minimum order
Free technical support
*Free delivery worldwide
Material Properties for Ceramics
Chemical Resistance
| Element | Value |
|---|---|
| Acids - concentrated | Good |
| Acids - dilute | Good |
| Alkalis | Fair |
| Halogens | Good |
| Metals | Fair |
Electrical Properties
| Element | Value |
|---|---|
| Dielectric constant | 3.8 |
| Dielectric strength( kV mm⁻¹ ) | 25-40 |
| Volume resistivity( Ohmcm ) | 10¹⁸@25 |
Physical Properties
| Element | Value |
|---|---|
| Refractive index | 1.46 |
| Useful optical transmission range | 180-2500nm |
| Apparent porosity( % ) | 0 |
| Water absorption - saturation( % ) | 0 |
| Density( gcm⁻³ ) | 2.2 |
Thermal Properties
| Element | Value |
|---|---|
| Melting point( C ) | 1715 |
| Upper continuous use temperature( C ) | 1100-1400 |
| Specific heat( J K⁻¹ kg⁻¹ ) | 670-740@25°C |
| Thermal conductivity( W m⁻¹ K⁻¹ ) | 1.46@20°C |
| Coefficient of thermal expansion( x10⁻⁶ K⁻¹ ) | 0.54@20-1000 |
Mechanical Properties
| Element | Value |
|---|---|
| Tensile modulus( GPa ) | 72-74 |
| Hardness - Knoop( kgf mm⁻² ) | 820 |
| Hardness - Vickers( kgf mm⁻² ) | 1000 |
| Shear strength( MPa ) | 70 |
| Tensile strength( MPa ) | 48 |
Pultrusions
| Element | Value |
|---|---|
| Compressive strength( MPa ) | 1100 |
Other Customers Purchased
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each
Starting at $173.14
Discounts applied for volume purchases -
Fused Quartz Granules Formula: SiO₂
Percentage Purity: 99.995%
Nominal Granule Size: 3mm
Weight: 2000g
Type: Injection Moulding
CAS Number: 14808-60-7
UOM Code: 042-485-70
eachStarting at $136.02
Discounts applied for volume purchases -
Fused Quartz Sheet Formula: SiO₂
Thickness: 1mm
Length 1: 50mm
Length 2: 50mm
Surface Finish: Polished On Both Sides
CAS Number: 14808-60-7
UOM Code: 033-688-19
eachStarting at $228.80
Discounts applied for volume purchases -
Nickel/Vanadium Alloy Sputtering Target (Ni93/V 7) Formula: Ni93/V 7
Thickness: 3mm
Diameter: 76.2mm
UOM Code: 300-832-51
eachStarting at $449.41
Discounts applied for volume purchases -
Fused Quartz Tube Formula: SiO₂
Outside Diameter: 9mm
Wall Thickness: 1mm
Inside Diameter: 7mm
Length: 1000mm
CAS Number: 14808-60-7
UOM Code: 002-130-39
eachStarting at $218.04
Discounts applied for volume purchases -
each
Starting at $213.61
Discounts applied for volume purchases
