Zirconium Sputtering Target

Zirconium Sputtering Target provides high purity, excellent uniformity, and strong corrosion resistance, making it ideal for thin-film deposition in advanced coatings and electronics. Known for producing films with excellent adhesion, corrosion resistance, and thermal stability, zirconium targets are used in optics, microelectronics, and surface engineering. Specific applications include barrier layers in semiconductor devices, corrosion-resistant coatings for aerospace components, and decorative yet durable finishes for consumer products. In research, zirconium sputtering targets are explored for modifying surface energy, enhancing biocompatibility, and improving wear resistance in thin-film systems. Their purity and consistency ensure precise and repeatable film properties in high-technology manufacturing.

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Properties

Reference & Citations

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Material Properties for Metals

Atomic Properties

Element	Value
Atomic number	40
Crystal structure	Hexagonal close packed
Electronic structure	Kr 4d² 5s²
Valences shown	2,3,4
Atomic weight( amu )	91.22
Thermal neutron absorption cross-section( Barns )	0.182
Photo-electric work function( eV )	3.8
Natural isotope distribution( Mass No./% )	96/ 2.8
Natural isotope distribution( Mass No./% )	92/ 17.1
Natural isotope distribution( Mass No./% )	91/ 11.2
Natural isotope distribution( Mass No./% )	94/ 17.5
Natural isotope distribution( Mass No./% )	90/ 51.4
Atomic radius - Goldschmidt( nm )	0.16
Ionisation potential( No./eV )	4/ 34.34
Ionisation potential( No./eV )	Jun-99
Ionisation potential( No./eV )	2/ 13.13
Ionisation potential( No./eV )	1/ 6.84
Ionisation potential( No./eV )	5/ 81.5
Ionisation potential( No./eV )	3/ 22.99

Mechanical Properties

Element	Value
Material condition	Polycrystalline
Material condition	Soft
Poisson's ratio	0.38
Poisson's ratio	0.38
Bulk modulus( GPa )	89.8
Bulk modulus( GPa )	89.8
Tensile modulus( GPa )	98
Tensile modulus( GPa )	98
Hardness - Vickers( kgf mm⁻² )	85-100
Tensile strength( MPa )	350-390
Yield strength( MPa )	250-310

Electrical Properties

Element	Value
Electrical resistivity( µOhmcm )	44@20@20°C
Superconductivity critical temperature( K )	0.61
Temperature coefficient( K⁻¹ )	0.0044@0-100°C
Thermal emf against Pt (cold 0C - hot 100C)( mV )	1.17

Physical Properties

Element	Value
Boiling point( C )	4377
Density( gcm⁻³ )	6.49@20°C

Thermal Properties

Element	Value
Melting point( C )	1852
Latent heat of evaporation( J g⁻¹ )	6360
Latent heat of fusion( J g⁻¹ )	211
Specific heat( J K⁻¹ kg⁻¹ )	281@25°C
Thermal conductivity( W m⁻¹ K⁻¹ )	22.7@0-100°C
Coefficient of thermal expansion( x10⁻⁶ K⁻¹ )	5.9@0-100°C