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Grade: Hot-Pressed
Formula: SiC
Form: Sputtering Target
Material: Silicon Carbide
Commodity: Ceramics

Hot-pressed Silicon Carbide Sputtering Target

Hot-pressed Silicon Carbide Sputtering Target is a dense, high-purity ceramic engineered for thin-film deposition, valued for its exceptional hardness, thermal stability, and resistance to chemical attack. Its ability to operate in high-energy plasma environments makes it indispensable in semiconductor, optoelectronic, and protective coating industries. Specific applications include the deposition of SiC-based nanocomposite coatings with high wear resistance and low friction for aerospace and tribological uses, thin-film growth for advanced semiconductor and optical components, and the production of crystalline 3C-SiC films via pulsed laser deposition for high-power and high-frequency electronic devices. Research demonstrates that tailored hot-pressing improve density, hardness, and oxidation resistance while enhancing sputtering efficiency. Patent innovations have also introduced non-stoichiometric SiC targets that provide significantly higher deposition rates for thin-film production. In both industrial and scientific contexts, Hot-pressed Silicon Carbide Sputtering Target is a critical material for next-generation thin-film technologies, bridging advanced electronics, optics, and protective coatings.
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Material Properties for Ceramics

Chemical Resistance
Element Value
Acids - concentrated Good
Acids - dilute Good
Alkalis Good-Poor
Halogens Good-Poor
Metals Fair
Electrical Properties
Element Value
Dielectric constant 40
Volume resistivity( Ohmcm ) 10³-10⁵@25
Physical Properties
Element Value
Apparent porosity( % ) 0
Density( gcm⁻³ ) 3.15
Thermal Properties
Element Value
Melting point( C ) 2650-2950
Upper continuous use temperature( C ) 1500-1650
Specific heat( J K⁻¹ kg⁻¹ ) 670-710@25°C
Thermal conductivity( W m⁻¹ K⁻¹ ) 90-160@20°C
Coefficient of thermal expansion( x10⁻⁶ K⁻¹ ) 4.5@20-1000°C
Mechanical Properties
Element Value
Tensile modulus( GPa ) 200-500
Hardness - Vickers( kgf mm⁻² ) 2400-2800
Shear strength( MPa ) 210-380
Tensile strength( MPa ) 400
Pultrusions
Element Value
Compressive strength( MPa ) 1000-1700

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