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Formula: Al₂O₃
Form: Sputtering Target
Material: Alumina
CAS Number: 1344-28-1
Commodity: Ceramics
Goodfellow's Alumina Sputtering Target is a high-purity aluminum oxide (Al₂O₃) product designed for thin film deposition applications. These targets exhibit excellent thermal stability and chemical inertness, ensuring high-quality, contamination-free coatings. Their dense microstructure and uniform composition allow for consistent sputtering rates and film properties, making them ideal for precision coating processes. Alumina sputtering targets find extensive use in industries such as electronics, optics, and advanced materials manufacturing. They are crucial in the production of dielectric layers in semiconductors, optical coatings for lenses and mirrors, and wear-resistant coatings for cutting tools. In cutting-edge applications, these targets are used to create high-k dielectric layers in next-generation electronic devices and to develop advanced ceramic coatings for aerospace components. In research settings, alumina sputtering targets play a vital role in studying novel thin film materials, developing new coating technologies, and exploring the properties of nanostructured ceramics. Their reliability and versatility make them indispensable in both industrial thin film production and scientific investigations, particularly in fields pushing the boundaries of material science and nanotechnology.
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Material Properties for Ceramics

Chemical Resistance
Element Value
Acids - concentrated Good
Acids - dilute Good
Alkalis Good
Halogens Good
Metals Good
Electrical Properties
Element Value
Dielectric constant 9-10.1
Dielectric strength( kV mm⁻¹ ) Oct-35
Volume resistivity( Ohmcm ) >10¹⁴@25
Physical Properties
Element Value
Apparent porosity( % ) 0
Water absorption - saturation( % ) 0
Density( gcm⁻³ ) 3.9
Thermal Properties
Element Value
Melting point( C ) 2100
Upper continuous use temperature( C ) 1700
Specific heat( J K⁻¹ kg⁻¹ ) 850-900@25°C
Thermal conductivity( W m⁻¹ K⁻¹ ) 26-35@20°C
Coefficient of thermal expansion( x10⁻⁶ K⁻¹ ) 8@20-1000°C
Mechanical Properties
Element Value
Tensile modulus( GPa ) 300-400
Hardness - Knoop( kgf mm⁻² ) 2100
Hardness - Vickers( kgf mm⁻² ) 1500-1650
Shear strength( MPa ) 330
Tensile strength( MPa ) 260-300
Pultrusions
Element Value
Compressive strength( MPa ) 2200-2600

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