Hafnium > 0.2% Zirconium Sputtering Target

We offer a range of Hafnium > 0.2% Zirconium Sputtering Targets, with 3 sizes and thicknesses to meet different application needs. They’re are made from zirconium doped with a small percentage of hafnium to enhance certain properties. The hafnium-zirconium alloy provides high thermal stability, corrosion resistance and uniform sputtering rates. These sputtering target discs are commonly used in semiconductor chip manufacturing and thin film coatings for optical, electrical and thermal applications.

Grade: Hafnium > 0.2%
Formula: Zr
Percentage Purity: 99.2%
Thickness: 3.5mm
Diameter: 25mm
CAS Number: 7440-67-7
UOM Code: 280-502-30

SKU: 1000118290

Product Code: ZR00-ST-000100

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$229.10

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Material Properties for Metals

Atomic Properties

Element	Value
Atomic number	40
Crystal structure	Hexagonal close packed
Electronic structure	Kr 4d² 5s²
Valences shown	2,3,4
Atomic weight( amu )	91.22
Thermal neutron absorption cross-section( Barns )	0.182
Photo-electric work function( eV )	3.8
Natural isotope distribution( Mass No./% )	96/ 2.8
Natural isotope distribution( Mass No./% )	92/ 17.1
Natural isotope distribution( Mass No./% )	91/ 11.2
Natural isotope distribution( Mass No./% )	94/ 17.5
Natural isotope distribution( Mass No./% )	90/ 51.4
Atomic radius - Goldschmidt( nm )	0.16
Ionisation potential( No./eV )	4/ 34.34
Ionisation potential( No./eV )	Jun-99
Ionisation potential( No./eV )	2/ 13.13
Ionisation potential( No./eV )	1/ 6.84
Ionisation potential( No./eV )	5/ 81.5
Ionisation potential( No./eV )	3/ 22.99

Mechanical Properties

Element	Value
Material condition	Polycrystalline
Material condition	Soft
Poisson's ratio	0.38
Poisson's ratio	0.38
Bulk modulus( GPa )	89.8
Bulk modulus( GPa )	89.8
Tensile modulus( GPa )	98
Tensile modulus( GPa )	98
Hardness - Vickers( kgf mm⁻² )	85-100
Tensile strength( MPa )	350-390
Yield strength( MPa )	250-310

Electrical Properties

Element	Value
Electrical resistivity( µOhmcm )	44@20@20°C
Superconductivity critical temperature( K )	0.61
Temperature coefficient( K⁻¹ )	0.0044@0-100°C
Thermal emf against Pt (cold 0C - hot 100C)( mV )	1.17

Physical Properties

Element	Value
Boiling point( C )	4377
Density( gcm⁻³ )	6.49@20°C

Thermal Properties

Element	Value
Melting point( C )	1852
Latent heat of evaporation( J g⁻¹ )	6360
Latent heat of fusion( J g⁻¹ )	211
Specific heat( J K⁻¹ kg⁻¹ )	281@25°C
Thermal conductivity( W m⁻¹ K⁻¹ )	22.7@0-100°C
Coefficient of thermal expansion( x10⁻⁶ K⁻¹ )	5.9@0-100°C

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Hafnium > 0.2% Zirconium Sputtering Target

Material Properties for Metals